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վúóײ26ҹҪ֮ʱ̵̳ȱ뽫ĸҵIJƷ¼ͬʱֹĸҽڲƷմϵͳļ͹ˮƽԼƹʵʵеͻƿũҪ콨ĻմϵͳǼ׵ý17ձǰоȫоƬ豸̡ASML̨ȽEUVߣֵ̻1.2ԪĿǰҵѴɹʶʹEUV̻ʹ뵼оƬ7nm5nmʱϢ̨൱оȥȫ豸2019ǰ

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Ϊ֯ġ䡱óŻһЩƶ͹¹輸ǧǮܾдСлóлŽĽ¼ƵȺ桰ʿǻϣСѧЩǮ뵱ؽϵֻͨǮóĸ֮ȥ525ɽؼ˱еسΪ־ݽ2006껹ڵɽЭϯ־һԴƵݸɲﱸشЭ3ЭʽƾΪشЭ᳤ʱЭԱʽƾʱԻΪеdz֮ǽӴһЩѿϴѧȴ̫ͥƶ޷߽ѧѧϰĺε־е

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